JPH0194460U - - Google Patents

Info

Publication number
JPH0194460U
JPH0194460U JP18885787U JP18885787U JPH0194460U JP H0194460 U JPH0194460 U JP H0194460U JP 18885787 U JP18885787 U JP 18885787U JP 18885787 U JP18885787 U JP 18885787U JP H0194460 U JPH0194460 U JP H0194460U
Authority
JP
Japan
Prior art keywords
heat
container
reflecting
substrate
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18885787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18885787U priority Critical patent/JPH0194460U/ja
Publication of JPH0194460U publication Critical patent/JPH0194460U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP18885787U 1987-12-14 1987-12-14 Pending JPH0194460U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18885787U JPH0194460U (en]) 1987-12-14 1987-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18885787U JPH0194460U (en]) 1987-12-14 1987-12-14

Publications (1)

Publication Number Publication Date
JPH0194460U true JPH0194460U (en]) 1989-06-21

Family

ID=31479923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18885787U Pending JPH0194460U (en]) 1987-12-14 1987-12-14

Country Status (1)

Country Link
JP (1) JPH0194460U (en])

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